VIONiC™ encoder series
The VIONiC encoder series is Renishaw's highest performing incremental optical encoder. It provides direct digital position feedback with superior metrology, high operating speeds and excellent reliability. The VIONiC readhead integrates Renishaw's market proven filtering optics and advanced interpolation technology. This provides ultra-low Sub-Divisional Error (SDE), excellent dirt immunity, and eliminates the need for additional adaptors or separate interfaces.
Additionally, VIONiC readheads are compatible with a wide range of linear, partial arc and rotary scales, from low expansion ZeroMet™ scales, to highly accurate REXM rings. This makes the VIONiC series the encoder of choice for versatility and superior metrology.
Ultra-low Sub-Divisional Error (SDE)
The VIONiC encoder series integrates Renishaw's market-proven filtering optics and signal processing for superior metrology performance. Advanced interpolation technology delivers ultra-low Sub-Divisional Error (SDE) of typically < ±15 nm; the lowest of all Renishaw optical encoders.
High speed operation with fine resolution
The VIONiC readhead features an intelligent interpolation chip to give resolution as fine as 2.5 nm, offering high precision and repeatability in any application. The encoder is available with a maximum clock rate of 50 MHz and operates at speeds up to 12 m/s. Speeds of up to 3.63 m/s are possible at a resolution of 0.1 µm, ideal for maximising throughput in semiconductor manufacturing processes.
Advanced Diagnostic Tools
VIONiC encoders are also designed with intuitive auto calibration mode, making them easy to install. They are compatible with both the ADTpro-100 standalone encoder diagnostic tool and the ADTi-100 diagnostic tool, both of which are compatible with the ADT View software. They provide in-depth advanced diagnostic information to aid optimisation of encoder installation and in-field fault finding to satisfy the most demanding motion control applications.
Find your VIONiC scale option
Linear
Scale type | Scale name | Accuracy | Scale pitch | Thermal expansion coefficient at 20 °C | Scale max length |
Stainless steel tape with track option
| ±5 µm/m | 20 µm | 10.1 ±0.2 µm/m/°C | Up to 10 m (> 10 m on request) | |
Narrow stainless steel tape scale
| ±5 µm/m | 20 µm | Matched to substrate material when scale ends are fixed with end clamps | Up to 20 m (> 20 m on request) | |
ZeroMet spar
| RELM/RELE | ±1 µm for up to 1 m, then ±1 µm/m | 20 µm | 0.75 ±0.35 µm/m/°C | Up to 1.5 m |
Stainless steel spar
| ±1.5 µm up to 1 m, ±2.25 µm up to 2 m, ±3 µm up to 3 m, ±4 µm up to 5 m | 20 µm | 10.1 ±0.2 µm/m/°C | Up to 5 m |
Partial arc
Scale type | Scale name | Accuracy | Scale pitch | Coefficient of thermal expansion at 20 °C | Supplied length |
Narrow stainless steel partial arc tape
| ±5 µm/m | 20 µm | 10.1 ±0.2 μm/m/°C | Up to 20 m (> 20 m on request) |
Rotary
Scale type | Scale name | Accuracy (depending on ring diameter) | Scale pitch | Thermal expansion coefficient at 20 °C | Ring diameter |
Stainless steel ring  | Graduation accuracy: ±3.97 to ±0.38 arc seconds | 20 µm | 15.5 ±0.5 µm/m/°C | 52 to 550 mm | |
Ultra-high accuracy stainless steel ring  | REXM20/REXT20 | Installed accuracy: (≥ 100 mm diameter) ±1 arc second | 20 µm | 15.5 ±0.5 µm/m/°C | 52 to 417 mm |
Optional Advanced Diagnostic Tools
The Advanced Diagnostic Tools assist in system set-up and planned maintenance to help minimise unscheduled machine downtime.
The ADTpro-100 is a handheld, standalone encoder diagnostic tool featuring an integral colour touch screen. The ADTpro-100:
- Requires no computer or additional set-up equipment to display comprehensive real-time encoder information.
- Is easy and intuitive to use with plug-and-play functionality to aid system set-up and calibration.
- Interfaces with the optional ADT View computer software, which allows encoder data to be saved as a record of the system setup and performance. ADT View can also be used to update the ADTpro-100 firmware
The ADTi-100, in conjunction with the intuitive ADT View computer software:
- Provides comprehensive real-time encoder data feedback to aid more challenging installations and diagnostics.
- Assists system set-up, calibration and signal optimisation along the entire axis.
- Allows data, such as signal strength vs position along the axis, to be saved as a record of the system setup and performance.
Both the ADTpro-100 and ADTi-100 are ideal for aiding system optimisation and diagnostics, particularly for installations when the readhead LED is not visible. They can be used standalone or in-line, connected between the readhead and the controller as part of the control loop.
Key features
Speed
| Clocked output option (MHz) | Maximum speed (m/s) | Minimum edge separation* (ns) | |||||||||||
| D (5 μm) | X (1 μm) | Z (0.5 μm) | W (0.2 μm) | Y (0.1 μm) | H (50 nm) | M (40 nm) | P (25 nm) | I (20 nm) | O (10 nm) | Q (5 nm) | R (2.5 nm) | ||
| 50 | 12 | 12 | 12 | 7.25 | 3.63 | 1.81 | 1.45 | 0.906 | 0.725 | 0.363 | 0.181 | 0.091 | 25.3 |
| 40 | 12 | 12 | 12 | 5.80 | 2.90 | 1.45 | 1.16 | 0.725 | 0.580 | 0.290 | 0.145 | 0.073 | 31.8 |
| 25 | 12 | 12 | 9.06 | 3.63 | 1.81 | 0.906 | 0.725 | 0.453 | 0.363 | 0.181 | 0.091 | 0.045 | 51.2 |
| 20 | 12 | 12 | 8.06 | 3.22 | 1.61 | 0.806 | 0.645 | 0.403 | 0.322 | 0.161 | 0.081 | 0.040 | 57.7 |
| 12 | 12 | 10.36 | 5.18 | 2.07 | 1.04 | 0.518 | 0.414 | 0.259 | 0.207 | 0.104 | 0.052 | 0.026 | 90.2 |
| 10 | 12 | 8.53 | 4.27 | 1.71 | 0.850 | 0.427 | 0.341 | 0.213 | 0.171 | 0.085 | 0.043 | 0.021 | 110 |
| 08 | 12 | 6.91 | 3.45 | 1.38 | 0.690 | 0.345 | 0.276 | 0.173 | 0.138 | 0.069 | 0.035 | 0.017 | 136 |
| 06 | 12 | 5.37 | 2.69 | 1.07 | 0.540 | 0.269 | 0.215 | 0.134 | 0.107 | 0.054 | 0.027 | 0.013 | 175 |
| 04 | 12 | 3.63 | 1.81 | 0.730 | 0.360 | 0.181 | 0.145 | 0.091 | 0.073 | 0.036 | 0.018 | 0.009 | 259 |
| 01 | 4.53 | 0.910 | 0.450 | 0.180 | 0.090 | 0.045 | 0.036 | 0.023 | 0.018 | 0.009 | 0.005 | 0.002 | 1038 |
*For a readhead with a 1 m cable
Ultra-low Sub-Divisional Error (SDE)
Interpolated error – 10 error cycles
X-axis: Readhead position (mm)
Y-axis: Error (nm)