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Ultra-High Vacuum (UHV) optical encoders

There are many industrial processes where the presence of significant amounts of air or other gases would be detrimental to the finished product. These processes must take place in an environment evacuated to very challenging levels of residual pressure. Where these processes involve motion control, Ultra-High Vacuum (UHV) encoder systems are necessary.

Maintain clean high-vacuum environments and minimise outgassing

All products in Renishaw's range of UHV compatible encoders are designed for use in a variety of scientific, semiconductor and other advanced industrial applications with vacuum pressures to 10-10Torr.

The fundamental principles of operation are the same as those for our equivalent standard-atmosphere products, but the UHV variants are designed to eliminate unvented voids and are specially constructed from clean, vacuum-compatible materials and adhesives. The suitability of the products for use in UHV environments is qualified by an independent specialist test house, including a Residual Gas Analysis (RGA) spectrum test (available on request).

The range includes incremental and absolute, open optical encoders.

There are many high-quality encoder products on the market, but few are also compatible with vacuum applications. Renishaw's TONiC UHV encoder delivers both excellent performance and reliability, it is our best choice.

VAD Instruments, South Korea

Incremental UHV encoders

TONiC™ UHV open encoder systems

The TONiC UHV encoder is a specially modified variant of the TONiC encoder series. It offers:

  • Compatibility with a range of scales:
    • Linear: RTLC stainless steel tape, RKLC narrow stainless steel tape, RELM ZeroMet spar, RSLM stainless steel spar.
    • Rotary (angle): RESM stainless steel ring, REXM ultra-high accuracy stainless steel ring.

Discover TONiC encoders

TONiC™ FS optical encoder on a white platform

Absolute UHV encoders

RESOLUTE™ UHV open encoder systems

The RESOLUTE UHV encoder is a specially modified variant of the RESOLUTE encoder series. It offers:

  • BiSS® C and Panasonic serial interfaces.
  • Compatibility with a range of scales:
    • Linear: RTLA stainless steel tape, RELA ZeroMet spar, RSLA stainless steel spar.
    • Rotary (angle): RESA stainless steel ring, REXA ultra-high accuracy stainless steel ring.

Discover RESOLUTE encoders

RESOLUTE™ UHV optical encoder on a white platform

Watch our introduction to RESOLUTE absolute UHV encoders

 

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