新闻稿： 新闻文章 - RSLM - 适用于平板应用的新型高精度光栅 (doc)
File size: 58 kB
Language: 中文（简体）
雷尼绍公司的SiGNUM™ RSLM光栅系统具有±30 nm的周期误差，配有滤波系统，分辨率为5 nm，安装简单，它还使20 μm栅距光栅的性能具备了小栅距光栅系统的所有优点。
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