规格手册： RESOLUTE™绝对式光栅系统 (pdf)
File size: 1.49 MB
Language: 中文（简体）
Part number: L-9518-0019
RESOLUTE™是一款真正意义上的绝对式精细栅距光栅系统，具有优异的测量性能。 RESOLUTE光栅技术采用一系列高精度直线钢带栅尺和直线硬栅尺或圆环，在超高速下可实现1 nm的分辨率。
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