白皮書: 妥善安裝光學尺以達最佳熱性能 (pdf)
File size: 604 kB
Language: 中文(繁體)
當機器的溫度改變時,許多機器零件的長度會因熱膨脹而改變。所有的光學尺和機器的其他元件一樣,都遵守相同的熱定律:光 學尺的長度會隨著溫度變化而改變。產生的誤差也許在可以接受的範圍內,或者可以透過控制機器的作業環境來控制誤差,但即 使是攝氏一度的溫度變化,都可能導致測量誤差超過十個百萬分點 (10 μm/m)。本白皮書會探討如何控制光學尺的熱膨脹程度。其中包括幾種選擇,可用來計算和補償因熱引起的應變。亦會說明當光學尺和基材的膨脹失配時,會如何影響光學尺系統的整體效能。
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